ECV Compact Direct-Acting Diaphragm Electronic Valves

Semiconductor

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Product Overview

The Fujikin ECV is the world’s first electrically-actuated direct diaphragm valve for specialty and ultra-pure gases. The use of a powerful solenoid made from innovative new materials has enabled actuator miniaturization and at the same time, high-speed opening and closing. This ECV with a durability of over 4 million cycles is available as standard valve or as IGS valve with dedicated solenoid driver and proximity sensor.