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The Fujikin pneumatically-actuated high durability diaphragm valves are for ultra-pure, flammable or toxic fluid lines for all types of semiconductor equipment and facilities. The direct diaphragm construction makes an industry and compactness and particle- and dead-space-free performance. This high durability valves are tested to over 30 million cycles. It is available with high Cv, temperature up to 200 °C, IGS compatible, with solenoid or proximity sensor solution.