UPG Fittings
Semiconductor
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Product Overview
UPG fittings, developed for use in leading edge, UHP semiconductor process gas delivery systems, are 70% the size of our current line of fittings. A ball bearing device is built into the nut to prevent torque to the seal, reduce particle generation and to insure a reliable seal. The sealing edge of the body and the sleeve share the same internal diameter as the gasket forming a dead space free connection.
The body, sleeve and gasket are made from our standard SUS 316L Double Melt Stainless Steel. This means no contamination in process gasses due to outgassing, prevention of corrosion from reactive gasses and reduced particle generation.
We have also included a gasket retainer as standard for easier installation.
