FCST1000 (M)Z
Semiconductor
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Product Overview
Multi Gas Multi Range (MG/MR) Model
Easy to change gas and flow rate by users with software. 8 bin sizes cover flows from 10sccm to 50slm.
High Flow Accuracy
±1% S.P. (25 - 100%; ±0.25% F.S at < 25% SP)
Hastelloy Sensor
Improved corrosion resistance for corrosive gases.
Input/Output Signal
Analog/RS-485, DeviceNet and EtherCAT (future)
Response Time
Response time < 1 sec for any given set point. Progressive PID.
Seal Materials
Both Metal Seal and Elastomer Seal are available.
